Vibrotactile using micromachined electromagnetic actuators array

One motivating application of this technology is the development of a tactile display interface, where discrete mechanical actuators apply vibratory excitation at discrete locations on the skin. Specifically, this paper describes the development fabrication and characterization of a 4 x 4 micro-actuator array of vibrating pixels for fingertip tactile communication. The vibrting pixels are generated by using an electromagnetic microresonator. The fabrication sequence and the actuation performance of the array are also presented.